Description
We offer ultrapure PFA tubing for use in highly corrosive
environments and where resistance to certain specialized developers
containing surfactants is required.
- Compliant to SEMI Standard F57-0314, the specification for
polymer components used in ultrapure water and liquid chemical
distribution systems (Note: UMT 3M 6502UHP tubing is still
undergoing qualification)
- Made from high purity PFA material to provide the lowest
extractable ionic and organic levels
- An optional ultraclean (UC) extrusion process yields tubing with
the lowest total metal extractables and least amount of surface
contamination
- Permanently laser marked to allow 100% lot traceability to a
specific material lot, production date and production inspection
record; custom laser marking is available
Notes:
- Quantities between roll and reel length maximums will be packaged on a roll
- Tight and consistent tolerances, along with lot-to-lot consistency are maintained using continuous online measurements of the FluoroLine tubing OD and wall thickness.
FluoroLine® Ultrapure PFA Tubing Applications
- High-purity, corrosive chemical handling
- Semiconductor applications
- Photolithography
- Bulk chemical delivery
- CMP
- Wet etch and clean
- Solar, LED, flat panel display
- Excellent performance with low surface tension chemistries
Specifications
1 Standard for PrimeLock® and Flaretek® fittings
| Size | Tube Size OD | Wall Thickness | Material Options |
|---|
| 1/16" | 0.062 (1.57 mm) | 0.015" (.38 mm) | Chemours 440 |
| 1/8" | 0.125 (3.18 mm) | 0.030" (.76 mm) | Chemours 440, 450 |
| 3/16" | 0.188 (4.76 mm) | 0.030" (.76 mm) | Chemours 440, 450 |
| 6 mm | 6 mm | 1.20 mm | Chemours 440 |
| 1/4" | 0.250 (6.35 mm) | 0.030" (.76 mm) | Chemours 440, 450 |
| 1/4" | 0.250 (6.35 mm) | 0.047" (1.19 mm)1 | Chemours 440, 450, 950, Daikin AP231SH |
| 1/4" | 0.250 (6.35 mm) | 0.062" (1.57mm) | Chemours 440, 450 |
| 8 mm | 8 mm | 1.20 mm | Chemours 440 |
| 5/16" | 0.312 (7.92 mm) | 0.030" (.76 mm) | Chemours 440, 450 |
| 3/8" | 0.375 (9.52 mm) | 0.062" (1.57 mm)1 | Chemours 440, 450, 950, Daikin AP231SH |
| 10 mm | 10 mm | 1.60 mm | Chemours 440 |
| 12 mm | 12 mm | 1.60 mm | Chemours 440 |
| 1/2" | 0.500 (12.70 mm) | 0.030" (.76 mm) | Chemours 440, 450 |
| 1/2" | 0.500 (12.70 mm) | 0.062" (1.57 mm)1 | Chemours 440, 450, 950, Daikin AP231SH |
| 3/4" | 0.750 (19.05 mm) | 0.062" (1.57 mm) | Chemours 440, 450, 950, Daikin AP231SH |
| 1" | 1.000 (25.40 mm) | 0.062" (1.57 mm) | Chemours 440, 450, 950, Daikin AP231SH |
| 1 1/4" | 1.250 (31.75 mm) | 0.075" (1.90 mm) | Chemours 440, 450 |
| 1 1/2" | 1.500 (38.10 mm) | 0.086" (2.18 mm) | Daikin AP231SH |
| 40 mm | 40 mm | 0.086" (2.18 mm) | Chemours 450, Daikin AP231SH |
Pressure/Temperature Ratings
FluoroLine PFA tubing pressure ratings were established using ASTM D2837. This test exposes the tubing to long-term, constant pressures at various temperature settings. Our test took 22 months to complete. From the analysis, a hydrostatic design basis (HDB) value is multiplied by a safety design factor to obtain a hydrostatic design stress. The HDB value is used to determine the tubing operating parameters. FluoroLine PFA tubing completed this extensive testing.
All FluoroLine tubing products are fully characterized and all performance ratings are derived from quantifiable data. Our design and process expertise allow you to confidently design your fluid systems reliably and safely.
Product Documentation
FluoroLine® Ultrapure PFA Tubing (PDF)
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